FAB Automation

     

Service for Brooks SMIF / PRI Automation System

 

 

SMIF for 200mm wafer

     INX2200, LPT2200, SLR 200, H-move
  
Ergospeed 3800, Ergospeed 2
  
Rebuild on-line protocol

  

 

 

 

 

 

Brooks PRI Aerotrek & Stocker

Aerotrek and Stocker installation
Motors and Boarders New and Repair available
BM23995L01, BM23994, BM300290000, BM25074
BM31801, BM31214, BM302960100, BM302960200
JGHT-4921-2, JGHT-5961-1