FAB Automation

     

Service for Brooks SMIF / PRI Automation System

 

 

ü SMIF for 200mm wafer

§ INX2200, LPT2200, SLR 200, H-move
§ Ergospeed 3800, Ergospeed 2
§ Rebuild on-line protocol

  

 

 

§ Brooks Infab SLR 200 LPTSM/L LPTSM/R
§ Brooks Infab SLR 200 LPTSL/L LPTSL/R
§ Brooks Infab SLR 200 H-move/L H-move/R

 

 

ü Brooks PRI Aerotrek & Stocker

§ Aerotrek and Stocker installation
§ Motors and Boarders – New and Repair available
§ BM23995L01, BM23994, BM300290000, BM25074
§ BM31801, BM31214, BM302960100, BM302960200
§ BM32647
§ JGHT-4921-2, JGHT-5961-1


 

 

 

 

§ Brooks PRI7500 AMHS Stocker